AMAT 0100-38027 Detector Board Component

AMAT  0100-38027 Detector Board Component

Product Details Introduction

AMAT 0100-38027 Detector Board Component

Product Overview

AMAT (Applied Materials) 0100-38027 detector board assembly is an electronic functional module installed in semiconductor manufacturing equipment, mainly used for signal detection, process monitoring, and data acquisition. It usually serves as an interface circuit between the detector and the main control system, responsible for receiving, amplifying, filtering, and processing signals from sensors or probes to achieve real-time monitoring of the process environment and operating status. This component may serve as a key monitoring link in processes such as deposition, etching, and ion implantation.

Technical parameters (typical direction, specific parameters need to refer to the original factory information)

Circuit structure: multi-layer printed circuit board, integrated detection circuit and signal processing module

Signal type: Supports analog and digital signal input, with high-speed sampling capability

Functional features: signal amplification, noise suppression, data conversion and transmission

Work environment: Suitable for high vacuum, low particle, and high cleanliness environments of semiconductor equipment

Interface: Compatible with AMAT device main controller and upper computer system

Application scenarios

Thin film deposition process (CVD/PVD/ALD)

Detecting changes in reaction gases or chamber environment during the sedimentation process to assist in closed-loop control.

Collect plasma luminescence or reflection signals for film thickness monitoring.

etching process

Monitor plasma state, emission spectra, or reaction byproduct signals.

Assist in achieving End Point Detection (EPD) for etching.

Ion implantation system

Detect ion beam intensity or distribution to ensure injection dose and uniformity.

Vacuum chamber status detection

Cooperate with sensors to monitor real-time pressure, gas flow rate, and temperature signals inside the chamber.

Factory Automation and Safety

As a front-end circuit for process detection and alarm triggering, it ensures process stability and equipment safety.

AMAT  0100-38027 Detector Board Component   Product imag

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