HUTTINGER 1397547-01-361248 Control Generator Module
Product Details Introduction
HUTTINGER 1397547-01-361248 Control Generator Module
Product Overview
Huttinger 1397547-01-361248 is an industrial grade control generator module primarily used in high-precision RF or plasma process systems. This module is used to control and regulate the output of the generator, achieve stable and efficient power supply, and ensure good matching with loads such as plasma chambers or power amplifiers.
Model: 1397547-01-361248
Type: Control Generator Module
Function: Control and regulate generator output to ensure stable power supply and load matching
Industrial applications: semiconductor manufacturing, thin film deposition, vacuum plasma treatment
Technical Features
High precision control: precise control of the generator output voltage, current, and power through the internal circuit of the module.
Strong stability: Suitable for industrial processes that operate for long periods of time, ensuring stable RF or DC output.
Good compatibility: Can be used in conjunction with various HUTTINGER generators, power amplifiers, and matching networks.
Complete protection function: It has overcurrent, overvoltage, and short-circuit protection, improving system safety.
Modular design: easy to replace, maintain, and upgrade, suitable for industrial production lines and scientific research equipment.
Application field
Semiconductor Manufacturing
Used for RF or DC power generation control in plasma etching, sputtering deposition, and ion implantation processes.
Thin film deposition and surface treatment
Provide stable power support in PVD/CVD, optical coating, and industrial coating processes.
Vacuum plasma process
Control the power of the plasma source to achieve precise plasma excitation and process optimization.
Scientific research experiment
Used as a generator output control module in materials science and plasma physics experiments.
industrial manufacturing
Applied to surface modification, functional film processing, and other processes that require high stability power supply.
Product imag

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