Edwards 3620-00219 Dry Vacuum Pump

Edwards 3620-00219 Dry Vacuum Pump 

 Introduction

Edwards 3620-00219 dry vacuum pump, oil-free dry roughing pump for semiconductor equipment.

Product Features:

1. Oil free design of pump chamber to prevent oil vapor pollution of process chamber

2. Non contact operation of the rotor, minimal wear, and long service life

3. Support blowing gas input, capable of handling process gases with particles and corrosive properties

4. Built in gas ballast function, capable of extracting condensable steam

5. It has local status display and can view running and fault codes

6. Support PLC remote start stop and alarm signal output

7. Water cooling and heat dissipation, stable operating temperature under high load conditions

8. Anti particle inhalation, reducing the risk of pump chamber blockage

9. Modular structure, easy maintenance and disassembly

10. Adapt to the continuous operation of the production line 24/7 without interruption

Product Parameters:

1. Pump type: oil-free dry vacuum pump

2. Cooling method: Water cooling

3. Control interface: switch IO, supports remote monitoring

4. Protection: Over temperature, motor overload, abnormal flow protection

5. Applicable operating conditions: rough vacuum extraction of semiconductor cavity

Edwards 3620-00219 is commonly used in vacuum roughing stations for etching and deposition equipment

Product imag

ontroller Module

SD-98762 101-098762-001 processor
HE693RTD600 Gas turbine module
IC695CPU315 Gas turbine module

Other website links

HIMA K9202B 安全单元CPU模块
BENTLY 85515-02 温度监测器
FOXBORO FBM214B P0927AH 工业控制模块