AMAT Applied Materials 0100-9066 Gas Panel Analysis Module

AMAT Applied Materials 0100-9066 Gas Panel Analysis Module

Product Details Introduction

AMAT 0100-9066 Gas Panel Analysis Module

Product application areas

Semiconductor manufacturing process equipment

Applied in etching (Etch), chemical vapor deposition (CVD, PECVD, ALD), physical vapor deposition (PVD), chamber cleaning and other processes.

By precise analysis and control of gas flow rate, pressure, and composition, process stability and repeatability are ensured.

Process gas monitoring and diagnosis

Used for real-time monitoring of gas purity, concentration, and abnormal leakage situations.

Combined with the control system of the equipment, perform closed-loop feedback to prevent process deviations.

Predictive Maintenance and Equipment Health Management

By analyzing gas data, engineers can identify potential issues with valves, pipelines, or MFCs (Mass Flow Controllers) in advance.

In the maintenance and calibration process, it serves as a diagnostic tool to ensure the long-term operation of equipment.

Advanced materials and device research and development

Used in experimental lines or R&D platforms for multi gas combination experiments, precision gas blending, and reaction process analysis.

Especially suitable for advanced processes that require extremely high gas conditions, such as high dielectric constant material deposition, low-k media, and compound semiconductor processes.

Display and Optoelectronic Industry

Gas supply and analysis module applied to production equipment such as TFT-LCD, OLED, solar thin film cells, etc.

Ensure the uniformity and stability of thin film deposition and etching processes.

MEMS and Sensor Manufacturing

Ensure precise gas control during microstructure processing in the etching, deposition, and packaging stages of MEMS devices.

Reduce yield decline caused by gas anomalies.

AMAT Applied Materials 0100-9066 Product imag

AMAT Applied Materials 0100-9066 Related website links

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Other website links

ABB 086339-501 控制卡
ABB 086444-005 直接光纤模块
ABB 086370-001 逻辑控制器模块