Nikon 4S013-373-3 Linear Motor Controller

Nikon 4S013-373-3 Linear Motor Controller 

 Introduction

Nikon 4S013-373-3 linear motor controller (SPA432A), NSR-S204B lithography machine WYL axis dedicated servo drive unit.

Product Features:

1. Linear motor closed-loop servo control achieves nanometer level positioning accuracy of the workbench

2. High bandwidth response to meet the high-speed scanning motion following requirements of lithography machines

3. Built in position feedforward compensation to reduce tracking errors in motion trajectories

4. Anti electromagnetic interference hardware design, adapted to the complex electromagnetic environment of lithography machine cabinets

5. Onboard fault detection circuit, abnormal output fault alarm signal

6. Backboard slot installation, plug and replace, convenient on-site maintenance

7. Supports dual loop control of speed and position, ensuring smooth and vibration free movement

8. Adapt to the overall control system of the device and exchange data through a dedicated bus

9. Board level temperature monitoring, overheat triggering protection to prevent module damage

10. Supports 24/7 uninterrupted production line operation with high reliability

Product Parameters:

1. Compatible equipment: Nikon NSR-S204B lithography machine WYL motion axis

2. Drive object: Linear motor of lithography machine

3. Interface: Device specific backplane gold finger signal interface

4. Protection: overcurrent, overheating, and position deviation exceeding limit protection

5. Working environment: Temperature controlled internal environment of lithography machine cabinet

Nikon 4S013-373-3 is mainly used for precision driving and positioning of the linear axis of the lithography machine worktable.

Product imag

ontroller Module

PHILIPS SCM040 940860010011 Digital output module
SD-108542 processor
SD-98762 101-098762-001 processor

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