TEL E280-000062-13 Controller MC Rack

TEL E280-000062-13 Controller MC Rack 

 Introduction

TEL E280-000062-13 is the ECC2 system MC motion control rack, which is the motion control base for the entire machine of the East Electronic Engraving Equipment. It integrates a backplane, power supply, and multi card slots, carries motion control modules, and controls various motion axes of the machine.

Application areas

1. TEL dry etching equipment motion control subsystem base

2. Etching machine wafer transfer robot module installation rack

3. Wafer lifting and positioning mechanism control board carrier unit

4. Process chamber door transmission logic control base

5. Semiconductor equipment MC motion controller complete carrier

6. Wafer load lock chamber transmission mechanism control rack

7. Etching equipment IO and motion board integrated installation unit

8. Wafer processing platform servo control module assembly base

9. FAB Etching Equipment ECC2 Control System Core Rack

10. Hardware carrier for multi axis collaborative control of semiconductor process equipment

Product Parameters

1. Standard rack structure with built-in system backplane bus and multiple slot positions

2. DC power supply inside the cabinet, integrated rack power distribution and filtering unit

3. Support mixed insertion of multiple motion and IO boards, compatible with module hot plugging

4. Backplane high-speed parallel bus, realizing high-speed data exchange between boards

5. Capable of collecting hardware fault status and outputting alarm signals externally

In summary, the TEL E280-000062-13 rack integrates power distribution, backplane, and slots, carrying the entire set of motion control boards, and is an important hardware base for the TEL etching equipment ECC2 control system.

Product imag

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