Nikon 4T070-668 amplifier module

Nikon 4T070-668 amplifier module 

 Introduction

Nikon 4T070-668 is an NSR immersion lithography machine FID-Y alignment amplifier module used for alignment detection optical path signal amplification processing, compatible with S620D series ArF scanning lithography machines.

Application areas

1. Photolithography machine FID-Y alignment detection optical path signal amplification

2. Wafer etching alignment sensor signal processing

3. Alignment subsystem drive unit of immersion lithography machine

4. Analysis of exposure equipment workpiece alignment data

5. Optical alignment measurement channel power signal conditioning

6. Photolithography cabinet plug-in alignment dedicated amplifier board

7. Mask alignment optical system signal conversion output

8. Collection and processing of wafer position offset detection signals

9. Alignment of lithography equipment with optical path closed-loop feedback unit

10. Optical detection module for semiconductor scanning exposure equipment

Product Parameters

1. The whole machine has a drawer style module structure that is compatible with the slot installation of lithography machine cabinets

2. Amplify weak optical detection signals to ensure alignment measurement accuracy

3. DC power supply inside the cabinet, high resistance to electromagnetic interference hardware design

4. Hardware self-test function, fault alarm output to the device host

5. The internal dedicated bus of the device completes high-speed transmission of alignment data

In summary, the Nikon 4T070-668 amplifier module has high signal processing accuracy and ensures wafer alignment performance, making it a key component of the alignment subsystem of the Nikon ArF immersion lithography machine

Product imag

ontroller Module

CI801 3BSE022366R1 processor input module
CI854AK01 3BSE030220R1 Pulse output module
TRICONEX CM01 CM01-A-V001 Pulse output module

Other website links

REXROTH HMD01.1N-W0020-A-07-NNNN 伺服控制器
SST-PB3-CLX-RLL 通信模块
BENTLY 3500/33-01-00 通道继电器模块