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Gasonics 212689-AN1 Arm Controller
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Gasonics 212689-AN1 Arm Controller
Product Details Introduction
product overview
The Gasonics 212689-AN1 arm controller is a drive control module used for robotic arms or transfer mechanisms in plasma cleaning equipment, mainly responsible for automatic handling, positioning, and transfer of wafers during processing. This controller is typically integrated into Gasonics Aura series plasma equipment to ensure smooth movement of wafers between process chambers.
Technical Parameter
Model: 212689-AN1
Control type: servo control or stepper motor drive (depending on the matching motor type)
Control object: Wafer handling robotic arm/Transfer Arm
Input signal: Action command signal issued by the main control system (such as start, stop, position command)
Output signals: motor drive, power control, position feedback signal, etc
Installation method: Modular rack installation, connecting the robotic arm to the main control system
Electrical interface: standard multi-core connector, compatible with arm feedback and power supply system
Applicable equipment: Gasonics Aura 1000/Aura 2000/Aura 3010 plasma cleaning equipment, etc
Application scenarios
Wafer transfer control
Control the automatic handling of wafers between Cassette, Loadlock, and process chambers to ensure precise alignment and smooth transfer.
Linkage with vacuum system
Synchronize with the vacuum door control system to ensure that handling actions are only performed under safe air pressure conditions.
Multi axis linkage operation
Control the rotation, extension, lifting, and other multiple degrees of freedom movements of the robotic arm to adapt to different cavity structures and wafer paths.
System startup initialization calibration
Perform robotic arm zeroing and positioning calibration actions during device startup to ensure handling accuracy and repeatability.
Product imag
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