Gasonics 210-0091-001-A Port Module

Gasonics 210-0091-001-A Port Module

Product Details Introduction

product overview

Gasonics 210-0091-001-A is a port module used in plasma cleaning equipment. Its main function is to achieve physical and signal interface connections between the process chamber and external devices such as wafer transfer devices, Loadlocks, interface transmission systems, etc. It serves as an interface node in the device system, ensuring the smooth operation of key functions such as wafer transfer, gas channels, and signal synchronization.

Technical Parameter

Model: 210-0091-001-A

Type: Port/Interface Module

Function: Wafer loading/unloading interface management, signal and pneumatic control transmission

Interface type: Multi channel cable connector+pneumatic/vacuum joint

Installation method: Fixed installation of panel or equipment frame

Communication method: Connect with the main control system to control components such as chamber doors, vacuum pumps, and rotary interfaces

Adaptation platform: Gasonics Aura series plasma cleaning equipment (such as Aura 2000, etc.)

Application scenarios

Wafer loading interface control

As the physical interface for wafer entry and exit in the process chamber, it works in conjunction with the handling robotic arm and conveyor system to ensure the safe transfer of wafers.

Gas and vacuum channel interface

Manage and control the physical connection of gas injection and vacuum pump interface to maintain and exchange the process atmosphere in the chamber.

Signal linkage and synchronization

Manage the input and output of process control signals to ensure synchronous operation between peripherals and chambers, such as access control, sensors, positioning signals, etc.

Maintain and replace connection nodes

Used as an easy to maintain interface component, it can be quickly disassembled and disassembled, simplifying equipment fault location and maintenance operations.

Product advantages

Stable and reliable structure: Industrial grade connection design, suitable for high-frequency operation and complex environments

High interface integration: combining electrical, pneumatic, and logic control to improve system integration efficiency

Convenient maintenance: modular design for quick replacement or maintenance, reducing downtime

Strong equipment compatibility: highly compatible with Gasonics Aura series plasma cleaning systems, supporting system cascade expansion

Product imag

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PC842-XYZ-N	6SC6500-0NA04	NTHS03
PC842-XYZ-F	Gespac GESSBS-4 GESSBS-6A GESSIO-1E	NTRO02
PC842-XYZ-A	Gespac INC-1	NKHS03-15
PC842-001-T	Gespac CI0-1B	PHARPSCH100000
PC842-001-N	Gespac SI0-1E	HESG332181R0001 70BL02D-S
PC842-001-F	Gespac GESVIG-4VME	NTCL01