Bird Electronics 8921SC13 coaxial resistor

Bird Electronics 8921SC13 coaxial resistor 

 Introduction

Bird Electronics 8921SC13 coaxial resistor, also known as high-power oil cooled RF dummy load commonly used in semiconductor equipment, is specifically designed to absorb RF power and perform RF power calibration. The stability of the load directly affects the calibration results of the cavity RF parameters.

Product Features

1. The standing wave ratio (VSWR) performance is very stable, with minimal fluctuations during operation and no need for prolonged preheating. Calibration can be done directly, reducing errors caused by calibration

2. Oil cooled heat dissipation structure, high-power and long-term working heat can be carried away by silicone oil, suitable for repeated RF source calibration on production lines

3. The precision screening of internal thin film resistor devices is strict, with good impedance consistency to avoid inaccurate test data caused by load deviation

4. Equipped with temperature interlock protection, if the oil temperature exceeds the standard, the interlock will be triggered to protect the RF power supply from being damaged by reverse signals

5. Integrated closed structure of the whole machine, directly connected to the RF interface on site, with minimal workload for replacement and debugging

Product Specifications

1. Rated continuous power 5000W, nominal impedance 50 ohms

2. Adapt to the mainstream RF frequency band of 13.56MHz semiconductor, with a working range of DC-28MHz

3. Oil cooled cooling method, only supports horizontal placement for use

4. Configure a dedicated RF interface that can interface with the output end of an RF generator

5. Working environment -40~+45 ℃, suitable for semiconductor workshop equipment room

Application Areas

1. Semiconductor etching, PVD equipment RF power calibration station

2. 13.56MHz RF source power calibration test scenario

3. Maintenance and calibration of RF system for plasma process equipment

4. RF instrument metrology laboratory high-power terminal load

5. Replacement of load spare parts due to aging and damage of the production line

Once the internal resistance of Bird Electronics 8921SC13 coaxial resistor ages and the cooling oil deteriorates, the standing wave will deteriorate, directly causing distortion of RF calibration data and indirectly affecting wafer process stability.

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