Koken KOSLARZE-II gate valve cylinder

Koken KOSLARZE-II gate valve cylinder 

 Introduction

The Koken KOSLARZE-II gate valve cylinder is a pneumatic actuator unit for semiconductor vacuum slit gate valves. It is driven by a gas source to open and close the valve plate, and is used to isolate different vacuum chambers. The stability of the valve action depends entirely on its status.

Product Features

1. Low release clean cylinder design, with no grease inside, will not release pollutants to the vacuum side, suitable for wafer process environment

2. Built in position sensing switch, direct feedback of on/off position signal to the machine, convenient for the system to determine the actual status of the valve

3. Optimization of buffer structure, minimal impact on valve plate start stop, reduced vibration transmission, and reduced risk of particle generation

4. Resistant to process exhaust gas corrosion, suitable for complex working conditions of etching and deposition equipment, extending the service life of cylinders

5. Modular assembly, disassembly and assembly do not require dismantling the entire set of gate valves, saving time for on-site replacement and reducing machine downtime

Product Specifications

1. Compressed air drive, compatible with standard gas source pressure for semiconductor equipment

2. Integrated magnetic position detection, outputting valve in place signal

3. Suitable for high-frequency reciprocating opening and closing of vacuum gate valves to meet the continuous cyclic action of the production line

4. The working environment temperature is 5-55 ℃, matching the working conditions of the dust-free workshop

5. Directly connected gate valve plate transmission mechanism, original spare parts can be replaced directly

Application Areas

1. Semiconductor Load Lock Slot Gate Valve Drive

2. Etching and PVD equipment chamber partition gate valve actuator

3. Vacuum isolation valve between cluster device cavities

4. Vacuum gate valve pneumatic unit for wafer transfer channel

5. Replacement and maintenance of spare parts for faulty gate valves on the production line

Once the Koken KOSLARZE-II gate valve cylinder experiences jamming or signal loss, the valve may not close tightly or open properly, directly reporting vacuum abnormalities and interrupting the entire machine process.

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