Coherent 4S091-147-2 laser module

Coherent 4S091-147-2 laser module 

 Introduction

Coherent 4S091-147-2 laser module is a customized coherent light source component for Nikon lithography machines, mainly serving the alignment detection optical path of the machine. The beam state directly affects the alignment detection results.

Product Features

1. Good consistency of beam output, strict control of wavelength drift, and reduced process risks such as overlay offset

2. Built in real-time detection of optical power, capable of capturing the attenuation of light intensity, facilitating operation and maintenance personnel to predict device lifespan

3. Equipped with a temperature control structure, even if there are slight fluctuations in the ambient temperature of the cabinet, the laser output will not run randomly

4. Good anti vibration performance, following the high-speed scanning operation of the machine, the beam is not easily shaken or offset

5. Integrated packaging assembly, plug-in design for connectors, no need for complex optical path debugging after replacement, reducing machine downtime

Product Specifications

1. Adapt to the internal power supply of lithography machine cabinets and integrate driver circuits

2. Built in optical power acquisition channel, providing feedback on the working status of the light source to the machine

3. Working temperature 5-40 ℃, suitable for clean workshop cabinet environment

4. Sealed module housing, blocking dust pollution to internal optical components

5. Dedicated optical interface, can directly replace faulty old modules

Application Areas

1. Nikon immersion lithography machine alignment detection light path

2. Workpiece positioning optical measurement unit

3. Photolithography equipment optical detection light source subunit

4. Exposure equipment optical sensing system

5. Maintenance and replacement of spare parts for production line malfunctions

The Coherent 4S091-147-2 laser module is the signal source of the alignment system. Abnormal light intensity or beam offset can easily cause on-site problems such as alignment alarms and inadequate engraving accuracy.

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