AMAT 0190-08825 Dry Pumpv

AMAT 0190-08825 Dry Pumpv 

 Introduction

AMAT 0190-08825 dry pump (IPUP T100L) is an oil-free front-end dry vacuum pump used in semiconductor equipment.

Product Features

1. Oil free design to avoid contamination of vacuum chamber by oil vapor reflux

2. Corrosion resistant process gas, suitable for semiconductor process exhaust gas extraction

3. Low operating vibration, low overall noise, suitable for clean workshop conditions

4. Built in runtime statistics, with maintenance reminder and alarm functions

5. Support communication docking with device master control to achieve pump unit status monitoring

Product Specifications

1. Three phase industrial AC power supply, compatible with semiconductor equipment power supply system

2. Dry oil-free pumping structure, used as a front-end vacuum pump for equipment

3. Adapt to factory circulating water cooling for heat dissipation, ensuring continuous operation and heat dissipation

4. Support device bus communication, capable of uploading operation and fault signals

5. The whole machine is a floor standing compact pump body, suitable for installation on the outside of the machine

Application Areas

1. AMAT PVD thin film deposition equipment pre stage vacuum pumping

2. Semiconductor etching process equipment vacuum system

3. Exhaust gas extraction from CVD chemical vapor deposition equipment

4. Wafer processing equipment vacuum chamber roughing unit

5. Maintenance and replacement of spare parts for semiconductor production line equipment

AMAT 0190-08825 dry pump is the core pumping spare part for achieving clean vacuum using material machines.

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