AMAT 0190-30906 Dry Pump

AMAT 0190-30906 Dry Pump 

 Introduction

AMAT 0190-30906 dry pump (IPUP T100L) is a Toyota oil-free front stage dry vacuum pump that is compatible with semiconductor machine applications.

Product Features

1. Oil free dry structure, eliminating oil pollution and ensuring the cleanliness of the chamber process

2. The pump body material is corrosion-resistant and suitable for various processes such as etching and deposition for exhaust gas extraction

3. Low vibration and noise during operation, suitable for semiconductor clean room environment

4. Built in status monitoring, with operation timing and fault alarm output functions

5. Support bus communication, linked with the machine master control, to achieve start stop and status acquisition

Product Specifications

1. Three phase AC power supply, suitable for semiconductor equipment power supply conditions

2. Can draw a basic vacuum of 20mTorr and use it as a front-end pump for equipment

3. Air cooled cooling structure, supporting long-term uninterrupted continuous operation

4. Equipped with a signal interface, it can upload pump operation and alarm status signals

5. Floor standing pump body structure, suitable for installation layout on the outside of the machine

Application Areas

1. AMAT Endura series PVD thin film deposition equipment

2. Vacuum pre stage pumping system for semiconductor etching equipment

3. CVD chemical vapor deposition equipment exhaust gas treatment unit

4. Application of rough vacuum chamber in wafer processing equipment

5. Semiconductor production line equipment maintenance and replacement spare parts

AMAT 0190-30906 dry pump is a key pump spare part for obtaining clean pre vacuum using material machines.

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