Sinfonia Technology SCE92100127 Dual Arm Wafer Handling Robot

Sinfonia Technology SCE92100127 Dual Arm Wafer Handling Robot 

 Introduction

Sinfonia Technology SCE92100127 is a Japanese New Finnia dual arm wafer handling robot, belonging to the semiconductor EFEM unit core transfer manipulator.

Product Features:

1. Dual arm independent operation, capable of alternately picking up and placing wafers, with high transmission efficiency

2. Clean grade robotic arm design, low particle generation, suitable for Class 1 clean environment

3. Servo closed-loop control, high repeat positioning accuracy, reduces wafer fragment scratches

4. Compact body structure, saving installation space inside EFEM equipment

5. Durable original structure, supporting 7 × 24-hour continuous operation of semiconductor production lines

Product Parameters:

1. Model: SCE92100127

2. Equipment type: Dual arm atmospheric wafer handling robot

3. Compatible wafer: 300mm

4. Working environment: atmospheric clean room

5. Supporting unit: Semiconductor EFEM equipment

Application fields:

1. Automatic wafer handling within semiconductor EFEM units

2. Wafer transfer between FOUP wafer box and process station

3. Front end wafer loading and unloading transport for etching and thin film equipment

4. Replacement and maintenance of spare parts for semiconductor equipment malfunctioning robotic arms

5. Use of refurbished and assembled spare parts for second-hand semiconductor equipment

The SCE92100127 dual arm handling robot is a key transport component of the 300mm wafer front-end equipment, ensuring efficient and safe wafer transportation.

Product imag

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