Parker Balston SF130952PHP Three Gas Nitrogen Generator

Parker Balston SF130952PHP Three Gas Nitrogen Generator 

 Introduction

Parker Balston SF130952PHP is a three gas integrated nitrogen generator that can provide multiple high-purity gas sources for semiconductor equipment.

Product Features:

1. Three gas path integrated output, capable of simultaneously outputting multiple nitrogen gases of different purities, one machine can be used for multiple purposes

2. Built in multi-stage precision filtration, thoroughly removing oil, gas, and water vapor, resulting in high cleanliness of the output gas

3. Modular filter structure, easy disassembly and replacement, reducing maintenance time in the later stage

4. Equipped with stable pressure and flow control, with minimal pressure fluctuations in the output gas source

5. Cabinet style compact body, suitable for semiconductor equipment cabinet installation, supports 7 × 24-hour continuous operation

Product Parameters:

1. Model: SF130952PHP

2. Equipment type: Three gas integrated nitrogen generator

3. Inlet air source: dry compressed air

4. Output: Three independent high-purity nitrogen gas outputs

5. Working mode: Continuous and uninterrupted gas production

Application fields:

1. Supply of high-purity nitrogen gas source for semiconductor process equipment

2. Wafer processing chamber blowing and gas curtain protection supply

3. Supporting gas source for semiconductor analysis and testing instruments

4. Replacement of faulty spare parts for old equipment generators

5. Inventory reserve of spare parts for semiconductor factory equipment

The SF130952PHP three gas nitrogen generator has a stable and clean output gas source, which is an important gas supply supporting equipment for semiconductor production lines

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