Edwards A732-01-983 Dry Vortex Vacuum Pump

Edwards A732-01-983 Dry Vortex Vacuum Pump 

 Introduction

Edwards A732-01-983 is an oil-free dry vortex vacuum pump commonly used in semiconductor equipment as a front-end vacuum acquisition component.

Product Features:

1. Fully dry oil-free design, no risk of oil return pollution, ensuring the cleanliness of the chamber

2. Vortex non-contact operation, low vibration, and low operating noise

3. Built in gas ballast function, capable of processing some condensable process steam

4. Modular structure, easy disassembly and assembly of seals, long maintenance cycle

5. The industrial machine is durable and suitable for continuous long-term operation of semiconductor production lines

Product Parameters:

1. Model: A732-01-983

2. Pump type: Dry vortex vacuum pump

3. Interface specifications: NW25 intake, NW25 exhaust

4. Power supply: single-phase 100-240V 50/60Hz

5. Cooling method: air-cooled

Application fields:

1. Pre stage vacuum pumping of semiconductor process equipment

2. Vacuum chamber rough pumping and transmission chamber vacuum establishment

3. Coating and etching equipment are equipped with vacuum units

4. Replacement of faulty spare parts for old equipment vacuum pump

5. Vacuum spare parts inventory reserve in semiconductor factories

The A732-01-983 dry vortex pump relies on clean pumping performance and is a commonly used coarse vacuum core equipment in semiconductor production lines

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