AMAT 0010-57289 Wafer Rotary Transfer Robot

AMAT 0010-57289 Wafer Rotary Transfer Robot 

 Introduction

AMAT 0010-57289 is a 300mm wafer rotation transfer robot for application materials, which is a spare part for the core mechanical arm of wafer transfer inside semiconductor equipment.

Product Features:

1. Specially designed for 300mm wafer rotation and transfer, with high compatibility with the original factory equipment

2. Clean arm structure, low dust production, suitable for semiconductor clean chamber environment

3. Servo closed-loop drive ensures smooth operation and reduces the risk of wafer fragments and scratches

4. Integrated specialized end effectors can quickly complete the actions of picking up, rotating, and feeding pieces

5. High continuous operation stability, meeting the long-term production conditions of semiconductor equipment

Product Parameters:

1. Model: 0010-57289

2. Applicable wafer: 300mm

3. Supporting end effector number: 0042-13780

4. Equipment type: Rotating transfer robotic arm component

5. Compatible equipment: AMAT series semiconductor process equipment

Application fields:

1. AMAT process equipment internal 300mm wafer rotation and handling

2. Wafer handover and workstation conversion between semiconductor cavities

3. Maintenance and replacement of robotic arms for semiconductor production equipment malfunctions

4. Dismantling, refurbishing, and assembling second-hand semiconductor equipment

5. Spare parts inventory reserve in semiconductor factories

The 0010-57289 rotary transfer robot ensures the safe transfer of 300mm wafers and is an indispensable transport component for application material process equipment

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