AE 31502411-386 DC power module

AE 31502411-386 DC power module 

 Introduction

AE 31502411-386 DC power module (DC Pinnacle 20kW), a high-power DC power supply unit for semiconductor technology.

Product Features:

1. High power DC closed-loop output with high precision in voltage and current regulation

2. Low output ripple ensures the cleanliness of plasma process power supply

3. Support switching between constant voltage and constant current working modes

4. Built in perfect arc suppression, stable operation under sudden load changes

5. The local panel displays the running status and fault codes

6. Support remote communication control and interface with the overall PLC system of the equipment

7. Modular rack structure, easy disassembly, replacement, and maintenance

8. Intelligent temperature controlled fan for heat dissipation, with controllable temperature rise during full load operation

9. Real time monitoring of output power, capable of uploading process operation data

10. Adapt to continuous production conditions of 7 × 24-hour wafer production line

Product Parameters:

1. Rated power: 20kW

2. Working mode: Constant voltage, constant current programmable output

3. Communication interface: analog I/O, digital communication interface

4. Protection functions: overvoltage, overcurrent, overtemperature, short circuit, arc protection

5. Compatible equipment: AMAT semiconductor process platform

AE 31502411-386 is commonly used for direct current bias power supply stations in PVD and etching equipment

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