Orion Machinery PAP03A-D-CE-SP Precision Air Processor

Orion Machinery PAP03A-D-CE-SP Precision Air Processor 

 Introduction

Orion Machinery PAP03A-D-CE-SP is a precision air processor designed by Haoliwang for dehumidification. It utilizes a heat pump for balanced temperature control and dehumidification, producing low dew point clean process air.

Application areas

1. Temperature and humidity control of the internal environment of the semiconductor lithography machine cabinet

2. Wafer testing equipment chamber air supply dehumidification treatment

3. Clean and dry gas supply for optical measuring instruments

4. Air conditioning for compound semiconductor process equipment

5. Low dew point environmental protection for chip packaging equipment

6. Pre process air drying treatment for vacuum coating

7. Laboratory precision optical platform environment adjustment

8. Air supply and dehumidification for flat panel display process equipment

9. Dry air supply for laser precision machining equipment

10. Temperature and humidity control of electronic component testing cabinet

Product Parameters

1. Heat pump balance control, no electric heating, temperature control accuracy ± 0.2 ℃

2. Three phase AC 200V ± 10%, 50/60Hz industrial power supply

3. Rated processing air volume of 3-5m ³/min, capable of outputting low dew point dry air

4. Built in fault self diagnosis, supports alarm signal output, and can be connected to the upper system

5. Equipped with a filtering unit to reduce particulate matter and adapt to semiconductor clean working conditions

In summary, Orion Machinery PAP03A-D-CE-SP has stable temperature control and dehumidification, and outputs clean and low humidity process air, making it a key unit for environmental regulation of semiconductor optical equipment

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