SHIMADZU TMP-3403LMC-T4 Turbomolecular Pump

SHIMADZU TMP-3403LMC-T4 Turbomolecular Pump 

 Introduction

The SHIMADZU TMP 3403LMC T4 turbo molecular pump is a magnetic levitation high pumping speed molecular pump designed for semiconductor ultra-high vacuum chamber pumping. Its core product features are as follows:

1. Magnetic levitation bearings, without mechanical contact wear

2. Fully dry and oil-free, outputting a clean vacuum environment

3. Anti corrosion coating on the rotor, resistant to some corrosive process gases

4. High pumping speed design, quickly establishing ultra-high vacuum

5. Built in drag and drop level to enhance the pressure tolerance of the front stage

6. Low vibration amplitude, suitable for precision process chambers

7. Real time collection of operating parameters such as speed and temperature

8. Multiple fault protection against overheating, overload, and overpressure

9. Support device bus communication and interface with the machine master control

10. High compression ratio of light gas, excellent hydrogen and helium pumping performance

11. Supports adjustable speed and adapts to different process loads

12. Nitrogen purging interface to suppress the accumulation of process dust

13. Modular structure, convenient on-site disassembly and maintenance

14. Standard flange interface, easy replacement and installation of pipelines

15. Can match multiple front-end pumps and adapt to various vacuum systems

SHIMADZU TMP 3403LMC T4 turbo molecular pump has strong performance and is commonly used in high flow and ultra-high vacuum processes such as semiconductor etching and thin film deposition.

Product imag

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