Edwards YT36-80-100 Turbomolecular Pump Turbine

Edwards YT36-80-100 Turbomolecular Pump Turbine 

 Introduction

#Edwards YT36-80-100 Turbomolecular Pump Turbo Product Features

Edwards YT36-80-100 is a core spare part for the rotor assembly of turbomolecular pumps, suitable for maintenance and replacement of corresponding series of molecular pumps. Its characteristics are as follows:

1. Multi stage moving blades are integrally formed to ensure the gradual compression and extraction performance of gas

2. Factory calibration of dynamic balance of impeller to suppress high-speed rotational vibration

3. Corrosion resistant blade material, capable of withstanding a small amount of corrosive gases from the manufacturing process

4. High precision blade inclination angle ensures the efficiency of nitrogen and hydrogen gas extraction

5. Lightweight rotor body to reduce bearing operating load

6. Strictly control the form and position tolerances, and maintain stable clearance between the moving and stationary blades

7. Surface low gas treatment to maintain a clean and high vacuum environment in the chamber

8. Adapt to the original factory bearing assembly reference position, with strong interchangeability

9. Able to withstand the rated maximum speed, and is not easily deformed during long-term high-speed operation

10. Compatible with pump body blowing air circuit, blocking particle deposition on blade surface

11. Can be used in conjunction with the original factory maintenance process for pump overhaul and replacement of spare parts

12. Clear dynamic balance markings and simple maintenance and assembly alignment

13. Impact resistant design, capable of withstanding mild process fluctuations

14. Meets the cleanliness standards for semiconductor vacuum components

15. Complete set of rotor components, directly replace to shorten equipment shutdown

The Edwards YT36-80-100 turbine is a core rotating spare part for molecular pumps, used for pump body maintenance and repair to restore high vacuum pumping capacity.

Product imag

ontroller Module

 OCAH 940181103 logic card
OCAHG 492838402 DCS system card
PP825 3BSE042240R1 Touch screen

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PC843-XYZ-N	6SC6500-0UC01	MC-PDOX02
PC843-XYZ-F	6SC6100-0GA00	NTDI01
PC843-XYZ-A	6SC6120-0FE00	NKTT01-3
PC843-001-T	6SC6101-2B-Z	HESG447433R0001 70BV05A-ES
PC843-001-N	6SC6100-0GA11	HESG446933R0002 70AB02B-E