Edwards STP-iXR1606C Turbomolecular Pump

Edwards STP-iXR1606C Turbomolecular Pump 

 Introduction

#Edwards STP-iXR1606C Turbomolecular Pump Product Features

Edwards STP-iXR1606C magnetic levitation turbo molecular pump is used for semiconductor high flow and high vacuum conditions, with the following characteristics:

1. Five axis magnetic levitation bearings, rotor non-contact, no grease contamination

2. Integrated pump body drive, no need for external controller, simplified wiring

3. High pumping speed performance, capable of withstanding high intake pressure and process gas volume

4. Equipped with a self balancing rotor, the whole machine has low vibration and does not interfere with the components inside the cavity

5. Water cooling and heat dissipation, suitable for long-term continuous heavy load operation

6. Set up a blowing air interface to block dust from entering the bearing area

7. Support multi posture installation and adapt to different installation angles of devices

8. Power consumption optimization, excellent energy consumption performance under high flow conditions

9. The shell has a high level of protection and can withstand the dust environment in the workshop

10. Real time collection of operating data such as speed, temperature, and load

11. Industrial communication docking with the main control of the entire machine to achieve remote monitoring

12. Save operation logs and alarm information for easy troubleshooting

13. Multiple safety protections against overheating, overload, and abnormal speed

14. The bearings have no mechanical wear, reducing the frequency of on-site maintenance

15. Standard flange interface, quick disassembly and replacement, reducing downtime

Edwards STP-iXR1606C turbo molecular pump, high flow integrated magnetic levitation, suitable for high vacuum scenarios in coating and semiconductor processes.

Product imag

ontroller Module

IDPG 940128102 Control card
 OCAH 940181103 logic card
OCAHG 492838402 DCS system card

Other website links

 PFTL 101B-10.0 3BSE004197R1张力控制器
 PFTL 101AER-2.0 3BSE023012R1压力测量
 PFTL 101B-2.0KN 3BSE004185R1张力传感器

PC844-XYZ-F	6SC6100-0GB11	MC-TAIH03
PC844-XYZ-A	6SC6100-0NA11	MC-TDIY22
PC844-001-T	6SC6110-3AA00	Honeywell
PC844-001-N	6SC6110-0EH02	MC-GAIH92
PC844-001-F	6SC6108-0SG02	MC-GAIH84
PC844-001-A	6SC6000-0NA02	MC-GAIH83
PC843-XYZ-T	6SC6140-0FE01	MC-GAIH22