Edwards PT41-SZ-200 Turbomolecular Pump

Edwards PT41-SZ-200 Turbomolecular Pump 

 Introduction

#Edwards PT41-SZ-200 Turbomolecular Pump Product Features

Edwards PT41-SZ-200 small turbo molecular pump is used to obtain clean high vacuum in equipment chambers, with the following characteristics:

1. Integrated driver unit, no need for external controller, simplifies system wiring

2. Oil free turbine structure, which will not produce oil pollution to the vacuum chamber

3. Compact size, suitable for installation space in narrow equipment cavities

4. Optimization of rotor blades, good light gas extraction effect

5. Fast startup acceleration, quickly reaching the target vacuum level

6. Equipped with a blowing air interface to prevent dust from entering the bearing area

7. Air cooled heat dissipation, no need for external water cooling pipelines, simple deployment

8. Low operating vibration reduces the impact on precision components of the cavity

9. Support multi angle installation and adapt to different assembly orientations of devices

10. Real time monitoring of core operating parameters such as speed and temperature

11. The communication interface supports remote reading of the status by the main control of the entire machine

12. Multiple protection interlocks for abnormal speed, overheating, and overload

13. Local storage of alarm records for easy troubleshooting

14. Meet SEMI specifications and adapt to semiconductor assisted vacuum stations

15. Modular structure, easy disassembly and replacement, reducing downtime

Edwards PT41-SZ-200 turbomolecular pump, compact and integrated, is commonly used for high vacuum applications in load locks and analytical chambers.

Product imag

ontroller Module

Honeywell SC-UCMX01 51307195-175 module
IDPG 940128102 Control card
 OCAH 940181103 logic card

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