Newport 0190-22248 Wafer Robot

Newport 0190-22248 Wafer Robot 

 Introduction

Newport 0190-22248 wafer robot is a front-end wafer transfer manipulator for semiconductor equipment, responsible for the internal wafer handling and transportation of the machine. Its core product features are as follows:

1. High precision in repeated positioning and small error in wafer handling position

2. Clean arm structure, low particle output, suitable for dust-free workshops

3. Multi axis linkage action, capable of completing the process of picking up, placing and transporting pieces

4. End specific gripper to prevent wafer scratches and breakage

5. Optimization of motion curve, smooth start stop and low vibration

6. Built in position sensor, providing real-time feedback on the posture of the robotic arm

7. Equipped with collision detection protection and automatic shutdown in case of abnormal situations

8. Compatible with AMAT machine communication protocol and connected to the main control system

9. Support the cyclic handling of multiple wafers to increase equipment capacity

10. Fault code output, convenient for quick maintenance and troubleshooting

11. Modular arm assembly, easy to disassemble and replace on site

12. The whole machine has a compact structure and is suitable for small spaces at the front end of the equipment

13. Support wafer transfer operations in vacuum/atmospheric environments

14. Long term continuous operation, stability meets production line requirements

15. Support parameter configuration and adapt to wafers of different sizes

Newport 0190-22248 wafer robot has strong reliability and is widely used in etching and coating equipment. It is the core component of semiconductor process equipment wafer transfer

Product imag

ontroller Module

MVME2100 controller card
PFSK152 3BSE018877R1 pulse output card
PP877K 3BSE069274R1 Touch screen

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