ESA80W-HDF dry vacuum pump

ESA80W-HDF dry vacuum pump 

 Introduction

The ESA80W-HDF dry vacuum pump is an Ebara Roots water-cooled dry pump used for pre pumping semiconductor equipment. Its core product features are as follows:

1. Fully dry oil-free structure to avoid process oil pollution

2. High pumping speed output, capable of quickly removing large cavities

3. Water cooling and heat dissipation, supporting long-term continuous operation

4. Strong light gas extraction capability, suitable for hydrogen working conditions

5. Built in nitrogen blowback to reduce dust accumulation

6. Variable frequency speed regulation, automatically adjusting the speed according to the load

7. Equipped with multiple protections for overheating, overload, and water outage

8. Support communication interface and interface with device control system

9. Fault record storage for easy troubleshooting

10. Low operating vibration, suitable for dust-free workshop environment

11. Modular structure, easy on-site maintenance and disassembly

12. The whole machine has a compact structure, saving space for placement

13. Excellent performance in extreme vacuum, meeting the needs of rough pumping

14. Standard pipeline interface, convenient system replacement and installation

15. Compliant with SEMI-S2 industry equipment safety standards

ESA80W-HDF dry vacuum pump has stable performance and is commonly used in high flow semiconductor processes such as MOCVD and load lock chambers

Product imag

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