Edwards PT50-0Z-006 Turbomolecular Pump

Edwards PT50-0Z-006 Turbomolecular Pump 

 Introduction

#Edwards PT50-0Z-006 Turbomolecular Pump Product Features

Edwards PT50-0Z-006 small turbo molecular pump, adapted for high vacuum acquisition in equipment chambers, features the following:

1. Integrated built-in driver, no need for external independent controller, reducing the number of accessories

2. Oil free turbine structure, no oil evaporation, ensuring a clean vacuum environment in the chamber

3. Small and lightweight pump body, suitable for installation in narrow equipment chamber spaces

4. Optimize the blade design of the rotor to have good pumping ability for light gases

5. Fast start stop speed, reducing the waiting time for the chamber to reach the target vacuum

6. Built in gas blowing interface to block process particles from entering the bearing area

7. Air cooling solution, no need for external water cooling pipelines, simple deployment

8. Low vibration output, reducing interference with precision components inside the cavity

9. Supports multi posture installation and can flexibly adapt to different installation angles of devices

10. Onboard status monitoring, real-time feedback of speed and temperature operating parameters

11. Digital communication interface, connected to the main control of the whole machine to achieve remote control

12. Multi level hardware protection interlock for abnormal speed, overheating, and overload

13. Local storage of fault information facilitates production line maintenance and problem tracing

14. Compliant with SEMI cleanliness standards and suitable for semiconductor assisted vacuum conditions

15. Overall modularization, easy disassembly and replacement, reducing equipment downtime

Edwards PT50-0Z-006 turbomolecular pump, compact and easy to integrate, oil-free and clean, is commonly used in high vacuum scenarios such as load locks and analysis chambers.

Product imag

ontroller Module

Honeywell SC-UCMX01 51307195-175 module
IDPG 940128102 Control card
 OCAH 940181103 logic card

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