Spectrometric LS-01-SA Controller Module

Spectrometric LS-01-SA Controller Module 

 Introduction

#Spectral LS-01 SA Controller Module Product Features

The Spectroscopy LS-01-SA is a dedicated controller module for semiconductor spectral detection, used for plasma spectral signal acquisition and process monitoring. Its characteristics are as follows:

1. Adapt the process chamber for spectral acquisition, complete optical signal conversion and data processing

2. High speed signal sampling, real-time capture of dynamic changes in plasma spectra

3. Multi channel signal input, compatible with multiple fiber optic sensing signal access

4. Built in baseline correction algorithm to reduce measurement deviation caused by environmental light interference

5. Trigger synchronization function, accurately synchronize with RF source and process timing

6. Wide spectral response range, covering the commonly used ultraviolet visible light bands in etching processes

7. Onboard data cache, short-term storage of spectral raw data

8. Digital communication output, docking with equipment master to achieve closed-loop process control

9. Support endpoint detection algorithm to identify the timing of endpoint switching in etching process

10. Low noise circuit design, strong analytical ability for weak spectral signals

11. Equipped with local parameter storage, power failure configuration is not lost

12. Real time status self check, abnormal working condition output alarm signal

13. Modular board structure, suitable for slot installation in equipment chassis

14. Anti electromagnetic interference, tolerant to complex electromagnetic environments around RF cavities

15. Convenient disassembly and assembly of the board, on-site replacement of spare parts to shorten downtime

The Spectroscopy LS-01-SA controller module has stable and synchronized data acquisition, and is commonly used for monitoring spectral endpoints in semiconductor etching and deposition processes.

Product imag

ontroller Module

Honeywell SC-UCMX01 51307195-175 module
IDPG 940128102 Control card
 OCAH 940181103 logic card

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