KLA Tencor 710-610801-001 Single Axis Controller

KLA Tencor 710-610801-001 Single Axis Controller

Product Details Introduction

product name

KLA Tencor 710-610801-001 Single Axis Controller

product overview

The KLA Tencor 710-610801-001 single axis controller is a high-performance control unit specifically designed for controlling a single servo axis (such as a platform, probe, lens module, etc.) in semiconductor equipment. It is used to achieve precise one-dimensional motion control and is one of the indispensable subsystems in wafer inspection and measurement equipment.

major function 

Single axis drive and control

Control the starting, speed, acceleration and deceleration curves, and precise position of servo motors or stepper motors to ensure that the motion platform or executing components achieve the set goals.

High precision feedback processing

Support encoder feedback input, achieve closed-loop control, and improve positioning accuracy and stability.

Motion contour generation

Generate smooth motion paths (such as trapezoidal or S-shaped velocity curves) based on input commands, suitable for high-precision, low vibration motion requirements.

Interface and communication support

Compatible with standard industrial communication interfaces such as RS-232, RS-485, CAN, PCI, etc., supporting data exchange and remote configuration with the main control system.

Technical Characteristics

Real time control core: Built in embedded processor with high-speed control loop and low latency response capability.

Integrate multiple protection mechanisms, including overcurrent protection, overvoltage protection, limit switch processing, and fault self diagnosis.

Microstep control capability: Supports microstep modulation and resolution adjustment to improve low-speed stability.

Modular design: convenient for replacement, maintenance, and integration, suitable for various automation control environments.

Typical application areas

Wafer inspection system: controls the single dimensional movement of optical modules or detection platforms, such as focus adjustment and sample scanning.

Measurement equipment: used for positioning detection heads or wafer trays to achieve precise measurement paths.

Automatic Optical Inspection (AOI) system: drives the lens group to move to complete image scanning.

Precision platform control: such as micro scale movement control for laser focusing modules, particle detection platforms, etc.

Product imag

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