NIKON 4T070-348-3 amplifier module

NIKON 4T070-348-3 amplifier module 

 Introduction

The Nikon 4T070-348-3 amplifier module is a power amplifier board for the Nikon lithography machine FID-Y alignment unit, used for amplifying and outputting alignment mechanism drive signals.

Product Features

1. High linearity of signal amplification ensures nanometer level positioning accuracy of alignment mechanism

2. Built in overcurrent and short circuit protection to prevent damage to components caused by mechanical impact

3. Industrial board level anti-interference design, adapted to the electromagnetic environment of lithography machine cabinets

4. Closed loop feedback collection, coordinated with the host to achieve real-time adjustment of alignment position

5. CPCI slot modular design, easy disassembly and assembly, reduces downtime for maintenance

Product Specifications

1. Machine backplane power supply, compatible with the internal power supply circuit of the lithography machine

2. Multiple power amplification channels, driving alignment execution components

3. Support internal dedicated bus of the device to achieve data exchange

4. The working environment temperature is 5-40 ℃, suitable for photolithography clean workshops

5. Standard CPCI slot, directly installed in the equipment chassis

Application Areas

1. Nikon NSR-S620D Immersion Lithography Alignment System

2. FID-Y alignment unit drive control of lithography machine

3. Exposure equipment optical alignment mechanism power amplification

4. Scanning lithography machine signal processing control system

5. Repair and replacement spare parts for lithography equipment

The Nikon 4T070-348-3 amplifier module is an essential power drive spare part for the alignment system of lithography machines

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