AE 3155053-003 RF Generator

AE 3155053-003 RF Generator 

 Introduction

AE 3155053-003 is a Paramount series semiconductor RF generator, commonly used for replacing spare parts in wafer process equipment, with stable plasma control performance.

5 product features:

1. Closed loop power regulation ensures that the output power is not easily drifting under load fluctuations, ensuring process consistency.

2. Fast arc detection and processing, instant power reduction when the chamber ignites, reducing damage to components inside the chamber.

3. Support multi-level pulse mode, which can flexibly adapt to the dynamic power requirements of different plasma processes.

4. Analog and digital dual interfaces facilitate remote setting and status feedback for device hosts.

5. Internal air duct optimization, air-cooled architecture, and reliable heat dissipation for long-term continuous operation in the workshop.

5 product parameters:

1. Rated output power of 5kW, standard operating frequency of 13.56MHz.

2. Three phase input 208-480VAC, suitable for semiconductor factory power supply environment.

3. The output impedance is 50 Ω, and the power regulation accuracy is controlled within ± 1%.

4. Standard 3U rack installation, forced air cooling for heat dissipation.

5. The working environment temperature is 0-45 ℃, suitable for clean equipment cabin operation.

5 application areas:

1. Plasma RF power supply for semiconductor etching equipment.

2. PVD thin film deposition equipment process power supply spare parts.

3. PECVD chemical vapor deposition equipment is used in conjunction with it.

4. Replace the faulty power supply of the old wafer processing equipment.

5. Maintenance and replacement of plasma coating technology for flat panel displays.

Overall, this is a discontinued model, and the market mainly focuses on disassembling and refurbishing spare parts. Before purchasing and putting it on the machine, it is necessary to verify the equipment material number and confirm the match

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