ATH V14621B0 Turbomolecular Pump

ATH V14621B0 Turbomolecular Pump 

 Introduction

ATH V14621B0 is the Adixen ATH500M magnetic levitation turbo molecular pump, commonly used for replacing spare parts in semiconductor vacuum equipment, with stable operation and maintenance free.

5 product features:

1. Full magnetic levitation bearing structure, no contact or grease, produces clean vacuum, and will not pollute the cavity.

2. Turbine traction composite impeller, capable of withstanding higher front-end pressure and adapting to a wider range of operating conditions.

3. Support installation in any direction, flexible internal layout of equipment cabinets, and installation is not limited by angles.

4. Equipped with a gas blowing interface, it can resist corrosive process gases and reduce internal sediment accumulation.

5. Built in status monitoring, communication feedback speed and temperature, automatic protection against abnormalities, reducing the risk of rotor damage.

5 product parameters:

1. The nominal pumping speed of nitrogen is 500L/s, with a magnetic levitation oil-free structure.

2. The ultimate vacuum can reach the level of 10 ⁻¹⁰ mbar, suitable for high vacuum processes.

3. Integrated driver controller, supporting RS232/485 communication docking with the host.

4. Air cooled cooling, intake flange DN160, compatible with standard vacuum chamber interface.

5. The working environment temperature is 10-40 ℃, suitable for continuous operation of equipment compartments in clean workshops.

5 application areas:

1. Replacement of spare parts for the high vacuum main pump of semiconductor etching equipment.

2. Vacuum acquisition of PVD and PECVD thin film deposition processes.

3. The main vacuum unit of analytical instruments such as electron microscopy and mass spectrometry equipment.

4. Vacuum chamber pumping operation of ion beam processing equipment.

5. Repair and replacement of old pumps for research vacuum chambers and coating machines.

In general, this pump belongs to the discontinued model, and the market mainly focuses on dismantling and refurbishing it. Before putting it into operation, maintenance and inspection should be done to confirm the rotor condition before putting it into process use.

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