Edwards NRB4-46-945 Dry Vacuum Pump

Edwards NRB4-46-945 Dry Vacuum Pump 

 Introduction

The Edwards NRB4-46-945 dry vacuum pump belongs to the iL70N series of semiconductor oil-free pre stage dry pumps, providing a clean rough vacuum environment for the machine.

Product Features

1. Completely oil-free dry structure to avoid oil vapor backflow and pollution of the process chamber

2. The pump body is corrosion-resistant and can be adapted to various corrosive semiconductor processes for exhaust gas extraction

3. Low operating vibration, low overall noise, suitable for clean workshop conditions

4. Built in fault self check, supporting status alarm output, convenient for equipment operation and maintenance

5. Support communication interface docking with machine main control to achieve start stop and status monitoring

Product Specifications

1. Three phase industrial AC motor drive, compatible with semiconductor equipment power supply

2. High pumping speed front-end dry pump to meet the rough pumping requirements of the cavity

3. Air cooled cooling, supporting long-term continuous operation without interruption

4. Equipped with standard industrial signal interface, upload operation and alarm signals

5. Compact pump body on the ground, suitable for peripheral installation layout of the machine

Application Areas

1. Pre stage vacuum pumping of semiconductor etching equipment

2. PVD thin film deposition equipment vacuum system

3. Exhaust gas extraction from CVD chemical vapor deposition equipment

4. Rough pumping application of vacuum load lock chamber

5. Semiconductor production line equipment maintenance and replacement spare parts

Edwards NRB4-46-945 dry vacuum pump is the core vacuum spare part for semiconductor equipment to obtain clean pre stage vacuum

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