Sumitomo KZ-06SRN0T0A3 Low Temperature Pump

Sumitomo KZ-06SRN0T0A3 Low Temperature Pump 

 Introduction

Sumitomo KZ-06SRN0T0A3 cryogenic pump is a compact clean low-temperature vacuum acquisition equipment developed by Sumitomo for semiconductor vacuum processes.

Product Features

1. Excellent water vapor extraction speed, capable of quickly capturing water vapor impurities inside the chamber

2. Oil free vacuum output, eliminating oil pollution and ensuring the cleanliness level of the process

3. The overall vibration amplitude of the machine is small, suitable for the working conditions of thin film precision processes

4. Support fully automatic regeneration process, can be integrated with equipment master control to achieve automated operation

5. The overall structure is compact and suitable for devices with limited cavity installation space

Product Specifications

1. Suitable for use with water-cooled compressors

2. Equipped with standard vacuum flange interface, convenient chamber docking

3. Supports communication protocols and enables remote status monitoring

4. Can quickly complete the cooling and heating regeneration cycle

5. Equipment operating environment temperature 5-35 ℃

Application Areas

1. Semiconductor PVD thin film deposition equipment

2. CVD chemical vapor deposition vacuum chamber

3. Ion implantation equipment vacuum system

4. Water vapor capture in various semiconductor process chambers

5. High end research vacuum experimental platform

The Sumitomo KZ-06SRN0T0A3 cryogenic pump is an important vacuum component in semiconductor vacuum production lines due to its clean and stable pumping performance.

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