TEL Y331-D204CE Thermal Generator

TEL Y331-D204CE Thermal Generator 

 Introduction

TEL Y331-D204CE thermal generator, a temperature controlled heating unit specifically designed for semiconductor etching equipment, provides a stable heat source for the process chamber and ensures consistent process temperature.

Product Features:

1. PID closed-loop temperature control, with small temperature fluctuations and uniform and stable thermal environment in the chamber

2. Integrated multiple protections for overheating and overcurrent, automatically cutting off output protection for over temperature chamber components

3. Native matching TEL device communication protocol, capable of receiving host temperature settings and returning status

4. Modular disassembly and assembly structure, easy replacement and maintenance, reducing production line downtime

5. Corrosion and dust resistance, suitable for harsh working conditions of semiconductor process equipment cabinets

Product Parameters:

1. Equipment type: Semiconductor process chamber heat generation unit

2. Temperature control mode: PID closed-loop temperature regulation

3. Equipped with temperature sensor signal acquisition and feedback

4. Support device IO communication, remote reading and writing of temperature parameters

5. Working temperature: 5-55 ℃, installed and used inside the cabinet

Application fields:

1. TEL etching machine chamber heating and temperature control

2. Constant temperature maintenance of semiconductor process chamber

3. Heating and anti condensation treatment for gas pipelines

4. Thermal management unit for wafer processing equipment

5. Supply of heat source for plasma process equipment

Accurate temperature control and overall compatibility make TEL Y331-D204CE a key temperature control component for semiconductor etching equipment.

Product imag

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