Adixen ATH1603M Turbomolecular Pump

Adixen ATH1603M Turbomolecular Pump 

 Introduction

Adixen ATH1603M turbo molecular pump, with a five axis fully magnetic levitation structure, can achieve high cleanliness and ultra-high vacuum output, with stable and reliable operation.

Product Features:

1. Fully magnetic levitation bearings, with no mechanical contact between the rotor, almost no wear, and maintenance free

2. Extremely low vibration, suitable for precision equipment working conditions that are sensitive to vibration

3. Onboard integrated driver control, supports remote communication monitoring, easy debugging

4. Supports installation from any angle and adapts to diverse layout requirements of devices

5. High compression ratio, strong gas extraction ability, achieving a clean and oil-free vacuum environment

Product Parameters:

1. Nitrogen pumping rate: 1360L/s

2. Rated speed: 39000rpm

3. Cooling method: Water cooling

4. Nitrogen compression ratio>1 × 10 ⁸

5. Whole machine weight: 17kg

Application fields:

1. Ultra high vacuum acquisition of semiconductor PVD and ALD process chambers

2. High vacuum systems for electron microscopes and mass spectrometry analysis instruments

3. Experimental equipment for plasma physics and high-energy physics research

4. Optical coating and thin film deposition vacuum equipment

5. Vacuum leak detection and precision measurement testing equipment - Vacuum unit

With the advantages of low vibration and high pumping speed of magnetic levitation, Adixen ATH1603M is widely suitable for various harsh ultra-high vacuum process scenarios.

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