Edwards NR5150000XS Dry Pump

Edwards NR5150000XS Dry Pump 

 Introduction

Edwards NR5150000XS is an oil-free dry vacuum pump from Edwards Semiconductor, which serves as a front-end pump to provide rough vacuum pumping capability for the vacuum chamber.

Product Features:

1. Completely oil-free dry structure, eliminating oil return pollution and ensuring the cleanliness of the process chamber

2. Non contact operation of the rotor, low vibration, and low operating noise

3. Equipped with gas stabilization function, capable of processing some water vapor and condensable process gases

4. Built in status monitoring sensor, fault alarm, convenient for equipment operation and maintenance

5. Modular structure, easy maintenance and disassembly, suitable for long-term continuous operation of production lines

Product Parameters:

1. Model: NR5150000XS

2. Pump type: Semiconductor dry vacuum pump

3. Inlet interface: ISO flange interface

4. Cooling method: air cooling

5. Suitable operating conditions: Pre stage exhaust of semiconductor process

Application fields:

1. Pre stage vacuum pumping for semiconductor etching and deposition equipment

2. Load lock chamber rapid rough suction to establish vacuum

3. Turbomolecular pump matched with front-end support pump

4. Replacement and maintenance of spare parts for dry pump faults on the production line

5. Vacuum spare parts inventory reserve in semiconductor factories

The NR5150000XS dry pump provides clean and stable rough vacuum, and is an indispensable front-end pumping equipment for semiconductor vacuum systems.

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