PolyScience 5360T11A110C Turbopump Circulating Cooler

PolyScience 5360T11A110C Turbopump Circulating Cooler 

 Introduction

PolyScience 5360T11A110C is a turbo pump type circulating cooler, commonly used for constant temperature heat dissipation and temperature control of semiconductor turbo molecular pumps.

Product Features:

1. Configure a high-pressure turbo pump with high output pressure and stable pipeline flow

2. High temperature control accuracy, reducing temperature fluctuations, and protecting the rotor components of the turbo pump

3. Multiple safety protections, equipped with liquid level, flow rate, and over temperature alarm shutdown

4. Closed loop, clean coolant, and less likely to cause pipeline scaling

5. Support long-term continuous operation and adapt to the mass production conditions of semiconductor production lines

Product Parameters:

1. Model: 5360T11A110C

2. Equipment type: Turbopump circulating cooler

3. Pump body form: turbine driven circulating pump

4. Cooling method: air-cooled heat dissipation

5. Function: Constant temperature cooling of molecular pumps and process components

Application fields:

1. Constant temperature cooling of semiconductor turbine molecular pump unit

2. Heat dissipation and temperature control of RF and power components in vacuum equipment

3. Cooling unit for etching and thin film deposition equipment

4. Replacement and maintenance of cooling equipment for production line faults

5. Inventory reserve of temperature control spare parts in semiconductor factories

The 5360T11A110C circulating cooler provides stable heat dissipation for the vacuum turbine pump, ensuring the continuous and reliable operation of the semiconductor vacuum system

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