SMC 0190-19293 circulating chiller

SMC 0190-19293 circulating chiller 

 Introduction

SMC 0190-19293 is an SMC circulating chiller suitable for AMAT semiconductor equipment, providing constant temperature cooling for process chambers and RF components.

Product Features:

1. Semiconductor specific constant temperature control, with small temperature fluctuations to ensure process consistency

2. Built in multiple protections for liquid level, flow rate, and temperature, with automatic fault alarms

3. Seal the circulation pipeline, keep the coolant clean, and avoid the risk of chamber contamination

4. Support device communication linkage and can interact with the machine's main control for operational status

5. The overall structure is compact, suitable for semiconductor cabinets, and can operate continuously for 7 × 24 hours

Product Parameters:

1. Model: 0190-19293

2. Equipment type: Semiconductor circulating cooling chiller

3. Cooling medium: Deionized coolant

4. Control accuracy: high-precision constant temperature regulation

5. Compatible equipment: AMAT etching and thin film process machine

Application fields:

1. Constant temperature cooling of semiconductor process chamber components

2. RF power supply and power device heat dissipation and temperature control

3. Wafer etching and deposition equipment cooling support

4. Replacement and repair of spare parts for chiller in case of production line malfunction

5. Inventory reserve of spare parts for semiconductor factory equipment

The 0190-19293 circulating water chiller stably removes the operating heat of the equipment and is an essential temperature control matching unit for semiconductor process equipment.

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