Edwards A53351945XS dry pump

Edwards A53351945XS dry pump 

 Introduction

Edwards A53351945XS dry pump, oil-free dry vacuum pump unit for semiconductor equipment.

Product Features:

1. The pump chamber has an oil-free structure to avoid oil vapor reflux and pollution of the process chamber

2. Non contact operation of the rotor, minimal wear, supports long-term continuous operation

3. Built in purge gas interface, capable of handling corrosive and particulate process gases

4. Water cooled cooling structure ensures stable temperature of the entire machine under high load conditions

5. Onboard fault diagnosis, capable of outputting various operational alarm signals

6. Support local operation and remote PLC communication control

7. Anti particle suction design reduces the risk of dust accumulation and pump blockage in the pump chamber

8. Modular components for easy on-site disassembly, maintenance, and repair

9. Vibration suppression design, low operating vibration, suitable for precision equipment

10. Equipped with gas ballast function, capable of extracting condensable steam

Product Parameters:

1. Pump type: oil-free dry vacuum pump

2. Cooling method: water-cooled cooling

3. Control interface: I/O signal, supports remote monitoring by the upper computer

4. Protection: Over temperature, overload, abnormal flow, motor fault protection

5. Applicable operating conditions: rough vacuum pumping of semiconductor process chamber

Edwards A53351945XS is commonly used in vacuum roughing stations for etching and deposition equipment

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