Edwards YT66-C6-001 Turbomolecular Pump

Edwards YT66-C6-001 Turbomolecular Pump 

 Introduction

The Edwards YT66-C6-001 turbomolecular pump is a corrosion-resistant magnetic levitation turbopump used for high vacuum pumping in semiconductor process chambers. The core product features are as follows:

1. Magnetic levitation bearing structure, no mechanical contact wear

2. Fully dry oil-free operation, providing a clean vacuum environment

3. Internal anti-corrosion treatment, compatible with corrosive process gases

4. Integrated drag and drop level to enhance the stress tolerance of the front stage

5. Stable pumping speed performance, quickly establishing high vacuum

6. Low operating vibration, suitable for precision process chambers

7. Real time monitoring of operating parameters such as speed and temperature

8. Multiple fault protection against overheating, overload, and overpressure

9. Support bus communication and interface with the main control system of the device

10. High rotor strength, supporting long-term continuous production

11. Excellent compression ratio of light gas and good hydrogen extraction effect

12. Equipped with energy-saving standby mode to reduce operating power consumption

13. Modular structure, convenient on-site disassembly and maintenance

14. Standard flange interface, convenient vacuum pipeline docking

15. Can be paired with multiple front-end dry pumps and adapted to various vacuum systems

The Edwards YT66-C6-001 turbomolecular pump has high reliability and is commonly used in semiconductor vacuum conditions with corrosive gases such as etching and coating

Product imag

ontroller Module

YOKOGAWA PW301 motor module
UAD206A101 3BHE019958R0101 controller card
UCD224A103 3BHE023681R0103 Control module

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