Edwards 3D80-000300-V2 Turbomolecular Pump

Edwards 3D80-000300-V2  Turbomolecular Pump 

 Introduction

The Edwards 3D80-000300-V2 turbo molecular pump is a semiconductor matched dry turbo pump used for high vacuum pumping of chambers. The core product features are as follows:

1. Fully dry oil-free structure, outputting clean vacuum without oil pollution

2. Integrate drag and drop structure to enhance the front-end pressure tolerance

3. Stable pumping speed, able to quickly establish a high vacuum environment

4. Built in speed and temperature monitoring, real-time feedback on operating status

5. Over temperature, overload, and over limit multiple fault protection

6. Low operating vibration, suitable for precision process chambers

7. The rotor has high strength and supports long-term continuous operation

8. Excellent compression ratio for light gases, with good hydrogen and helium extraction effects

9. Support communication bus and interface with device main control system

10. Equipped with energy-saving standby mode to reduce the overall power consumption of the machine

11. Modular components, convenient on-site disassembly and maintenance

12. Standard flange interface, simple vacuum pipeline docking

13. Resistant to process gas shock and strong adaptability to working condition fluctuations

14. Compact overall structure, saving equipment installation space

15. Can match multiple front-end pumps and adapt to various vacuum systems

The Edwards 3D80-000300-V2 turbomolecular pump has reliable performance and is commonly used for high vacuum pumping in analytical equipment and semiconductor small process chambers.

Product imag

ontroller Module

PPE091A101 3BHE044481R0101 Control module
YOKOGAWA PW301 motor module
UAD206A101 3BHE019958R0101 controller card

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