Kyosan Electric 0190-64462 RF Generator

Kyosan Electric 0190-64462 RF Generator 

 Introduction

Kyosan Electric 0190-64462 RF generator is a semiconductor machine plasma process RF power supply unit that provides RF energy to the cavity. The core product features are as follows:

1. High power output accuracy and stable process repeatability

2. Supports both continuous and pulse RF output modes

3. Built in impedance adaptive, adapted to changes in cavity load

4. Good harmonic suppression effect, reducing process interference

5. Multiple fault protection for standing wave, over temperature, and over current

6. Real time collection of power standing wave data and uploading

7. Compatible with AMAT machine communication protocol, main control linkage

8. Water cooling and heat dissipation, supporting long-term high-power operation

9. Fast matching response and high plasma arc initiation efficiency

10. Fault code output for easy troubleshooting of equipment

11. Rack mounted structure, easy disassembly and replacement of cabinets

12. The whole machine is environmentally resistant and suitable for semiconductor cleanrooms

13. Wide power regulation range, suitable for multiple process formulas

14. Status indicator light, visually viewing equipment operating conditions

15. RF isolation design to reduce system signal interference

The Kyosan Electric 0190-64462 RF generator operates reliably and is commonly used in etching and thin film deposition semiconductor process chambers.

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