Edwards YT79-0Z-010 Turbomolecular Pump

Edwards YT79-0Z-010 Turbomolecular Pump 

 Introduction

The Edwards YT79-0Z-010 turbomolecular pump is a magnetic levitation turbopump used in semiconductor equipment for high vacuum chamber pumping. The core product features are as follows:

1. Magnetic levitation bearing structure, no mechanical contact wear

2. Dry oil-free operation, outputting clean high vacuum

3. High pumping rate, which can quickly achieve process vacuum

4. Integrated drag and drop level to enhance the front-end pressure tolerance

5. Low operating vibration, suitable for precision process chambers

6. Built in real-time monitoring function for speed and temperature

7. Multiple fault protection for overcurrent, over temperature, and over limit

8. Support communication bus and interface with device main control system

9. High rotor strength, stable long-term continuous operation

10. Excellent compression ratio of light gas and good hydrogen extraction effect

11. Support energy-saving mode to reduce device operating power consumption

12. Overall modularization, convenient on-site disassembly and maintenance

13. Standard flange interface, convenient vacuum pipeline docking

14. Resistant to process gas shock and strong adaptability to working condition fluctuations

15. Can match multiple front-end dry pumps and adapt to various vacuum systems

The Edwards YT79-0Z-010 turbomolecular pump has outstanding stability and is commonly used in high vacuum process scenarios such as semiconductor etching and thin film deposition.

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