AMAT 0190-54045 Helium Low Temperature Compressor

AMAT 0190-54045 Helium Low Temperature Compressor 

 Introduction

#AMAT 0190-54045 Helium Low Temperature Compressor Product Features

AMAT 0190-54045 helium low-temperature compressor, suitable for semiconductor low-temperature cold pump circulation gas supply, with the following characteristics:

1. Specially designed for high-purity helium gas circulation compression, ensuring stable refrigeration of the cold head system

2. Non hydraulic compression chamber structure to prevent oil from mixing into the helium circuit

3. Pressure closed-loop control, continuous and stable output gas supply pressure

4. Built in high-efficiency water-cooled heat dissipation, temperature control for long-term continuous operation

5. Integrate oil and gas separation and filtration components to maintain high cleanliness of helium gas

6. Adaptive load regulation, dynamically adjusting output according to the working conditions of the cold pump

7. The pipeline adopts special sealing to reduce the leakage loss of helium medium

8. Equipped with pressure and temperature sensors, real-time collection of operating parameters

9. Fault event storage records for easy troubleshooting and traceability of production line faults

10. Industrial communication interface, supporting remote interaction with host systems

11. Equipped with multiple safety interlock protections for overpressure, overtemperature, and low pressure

12. Built in helium buffer circuit to reduce pressure fluctuations in pipelines

13. Rack mounted structure, suitable for internal installation layout of equipment cabinets

14. Complies with SEMI semiconductor factory safety and cleanliness standards

15. Modular filters and seals, convenient on-site maintenance and replacement

AMAT 0190-54045 helium low-temperature compressor provides stable gas supply and low leakage, providing reliable helium circulation power for semiconductor low-temperature vacuum pumps.

Product imag

ontroller Module

Honeywell SC-UCMX01 51307198-175 module
Honeywell SC-UCMX01 51307195-175 module
IDPG 940128102 Control card

Other website links

 PFCL 201C-5.0 3BSE027070R5电力保护装置
 PFCL 201C-20.0 3BSE027070R10张力控制器
 PFTL 101B-10.0 3BSE004197R1张力控制器

PCE835-XYZ-N	6SC6100-0GE01	MC-TAIH53
PCE835-XYZ-A	6SC6101-3B-Z	MC-TAIH62
PCE835-001-T	6SC9711-0BM0	MC-PDOY22 80363975-150
PCE835-001-N	6SC6101-4A-Z	MC-PD1X02
PCE833-001-T	GESPAC PIA-2A	MC-TAIL02
PCE833-001-N	6SC6101-2A-Z	MC-TAIL12