Edwards A57222958 Dry Vacuum Pump

Edwards A57222958 Dry Vacuum Pump  

 Introduction

#Edwards A57222958 Dry Vacuum Pump Product Features

Edwards A57222958 semiconductor dry vacuum pump, suitable for load lock and light corrosion process exhaust, with the following features:

1. Claw type oil-free dry structure, independent oil chamber isolation for bearings and gears

2. Non contact operation of the rotor reduces the generation of internal wear particles

3. Built in controllable nitrogen purging to suppress the adhesion of process by-products

4. Adaptive variable frequency drive, with the pumping speed dynamically adjusted according to the actual load

5. Rapid pumping performance, shortening the waiting period for cavity emptying

6. Air cooled cooling architecture, no need for external cooling water, flexible layout

7. Built in gas town module, processing condensable process gases such as water vapor

8. Local status indicator light, providing intuitive feedback on pump operating conditions

9. Digital communication interface, compatible with fab automation control system

10. Complete operation log storage, convenient for fault tracing and analysis

11. The intake end is equipped with an isolation valve, which prevents medium backflow when the machine is stopped

12. Integrated shock-absorbing base to reduce the overall vibration transmission output of the machine

13. Multi level safety interlock protection for overheating, overload, and abnormal intake

14. Compact body, suitable for Subfab's narrow installation space

15. Modular layout of vulnerable parts, easy on-site maintenance and disassembly

Edwards A57222958 dry vacuum pump, air-cooled without water cooling, low particle output, suitable for semiconductor load lock and thin film process exhaust conditions.

Product imag

ontroller Module

Honeywell SC-UCMX01 51307198-175 module
Honeywell SC-UCMX01 51307195-175 module
IDPG 940128102 Control card

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PCE835-XYZ-N	6SC6100-0GE01	MC-TAIH53
PCE835-XYZ-A	6SC6101-3B-Z	MC-TAIH62
PCE835-001-T	6SC9711-0BM0	MC-PDOY22 80363975-150
PCE835-001-N	6SC6101-4A-Z	MC-PD1X02
PCE833-001-T	GESPAC PIA-2A	MC-TAIL02
PCE833-001-N	6SC6101-2A-Z	MC-TAIL12