Spectrum 10513-00R 500362787 RF Generator

Spectrum 10513-00R 500362787 RF Generator 

 Introduction

#Spectrum 10513-00R 500362787 RF Generator Product Features

Spectrum 10513-00R 500362787 is a semiconductor high-power 13.56MHz RF generator used for plasma process driving. Its characteristics are as follows:

1. High frequency 13.56MHz output, suitable for etching and thin film deposition plasma processes

2. High power output design, sufficient power margin, stable long-term heavy-duty operation

3. Digital closed-loop power regulation to suppress power drift and ensure inter chip process consistency

4. Support pulse modulation output, customizable pulse duty cycle to adapt to special processes

5. Built in fast impedance detection to cope with dynamic and sudden changes in cavity load scenarios

6. High precision real-time detection of incident/reflected power, fast data acquisition response

7. Millisecond standing wave protection, cutting off output at the moment of ignition to protect power devices

8. Built in complete event storage, recording alarms and power curves for easy fault recovery

9. Standardized industrial communication interface, which can be connected to the equipment master to achieve linkage control

10. Water cooled cooling structure, controllable temperature rise of the whole machine under high-power working conditions

11. Supports two operation modes: local panel and remote control

12. Excellent suppression of harmonics and stray signals, reducing cavity interference noise

13. Rack installation structure, adapted to the internal installation layout of standard cabinets

14. Multiple hardware interlocks, active alarm protection for over temperature, over current, and over reflection

15. Modular power unit, easy replacement of spare parts, and shortened downtime of the production line

Spectrum 10513-00R 500362787 RF generator, with high power and high response, meets the needs of semiconductor mass production plasma processes.

Product imag

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PCE835-XYZ-N	6SC6100-0GE01	MC-TAIH53
PCE835-XYZ-A	6SC6101-3B-Z	MC-TAIH62
PCE835-001-T	6SC9711-0BM0	MC-PDOY22 80363975-150
PCE835-001-N	6SC6101-4A-Z	MC-PD1X02
PCE833-001-T	GESPAC PIA-2A	MC-TAIL02
PCE833-001-N	6SC6101-2A-Z	MC-TAIL12