Edwards NRY24F000 vacuum pump

Edwards NRY24F000 vacuum pump   

 Introduction

#Edwards NRY24F000 Vacuum Pump Product Features

Edwards NRY24F000 semiconductor dry vacuum pump, suitable for harsh process exhaust conditions, features the following:

1. Claw type dry pump body structure, completely oil-free, eliminating oil pollution in the process chamber

2. Special corrosion-resistant pump chamber coating, suitable for extracting exhaust gases containing particles and corrosive processes

3. Graded nitrogen purging circuit to reduce the deposition and scaling of by-products

4. Wide load frequency conversion regulation, automatic switching between peak exhaust and standby modes

5. With high pumping speed output, the vacuum remains stable even in the face of fluctuating process gas volume

6. Air cooling solution, no need for external cooling water, more flexible deployment

7. Built in gas ballast function to process condensable steam and reduce internal condensation

8. Local operation panel, allowing for intuitive viewing of operating parameters and status

9. Support multi protocol communication and connect to factory equipment automation control system

10. Built in complete event log, recording faults and operating history for easy traceability

11. Elastic exhaust interface, suitable for different workshop pipeline layouts

12. Optimize the shock-absorbing base, suppress overall vibration, and reduce workshop interference

13. Equipped with multiple protection interlocks for overload, overheating, and gas anomalies

14. Complies with SEMI-S2 safety standards and meets the admission requirements for semiconductor factories

15. Internal vulnerable parts zoning layout, quick on-site replacement, and reduced downtime

Edwards NRY24F000 vacuum pump, air-cooled without water cooling, resistant to particle corrosion, suitable for semiconductor process mass production exhaust scenarios.

Product imag

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PCE835-XYZ-N	6SC6100-0GE01	MC-TAIH53
PCE835-XYZ-A	6SC6101-3B-Z	MC-TAIH62
PCE835-001-T	6SC9711-0BM0	MC-PDOY22 80363975-150
PCE835-001-N	6SC6101-4A-Z	MC-PD1X02
PCE833-001-T	GESPAC PIA-2A	MC-TAIL02
PCE833-001-N	6SC6101-2A-Z	MC-TAIL12