Edwards ACDA0A122200 Vacuum Pump

Edwards ACDA0A122200 Vacuum Pump   

 Introduction

Edwards ACDA0A122200 dry vacuum pump, suitable for semiconductor process vacuum extraction, with the following features:

1. Oil free dry pump chamber, no oil mist pollution, ensuring clean process

2. Inner cavity anti-corrosion coating, capable of handling corrosive process gases

3. Built in nitrogen purging to reduce dust deposition and component corrosion

4. Excellent performance in extreme vacuum, capable of long-term continuous operation

5. Variable frequency motor drive, automatic speed regulation for load changes, more energy-efficient

6. Water cooled cooling structure, controllable temperature rise under heavy load conditions

7. Stable exhaust flow rate, suitable for variable process gas loads

8. Integrated fault self check, quickly identify pump body abnormalities

9. Support communication interface, can be connected to remote monitoring of the upper computer

10. Compact overall structure, saving equipment installation space

11. Equipped with anti backflow protection to prevent backflow of the cavity medium

12. Low vibration noise, suitable for Subfab workshop environment

13. Meet SEMI industry safety usage standards

14. Direct extraction at atmospheric pressure, without the need for additional front-end pumps

15. Modular components, easy disassembly and assembly, reducing maintenance time

Edwards ACDA0A122200 vacuum pump is corrosion-resistant, energy-saving, and stable in operation, suitable for vacuum conditions in semiconductor etching and thin film processes.

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