Technologies EV-M502NSF-BE Dry Vacuum Pump

Technologies EV-M502NSF-BE Dry Vacuum Pump

 Introduction

#Technologies EV-M502NSF-BE Dry Vacuum Pump Product Features

Technologies EV-M502NSF-BE is a multi-stage Roots oil-free dry vacuum pump suitable for semiconductor strong corrosion processes, with the following characteristics:

1. Oil free dry structure, no oil mist reflux, ensuring clean process

2. SF PTFE coated inner cavity, resistant to strong acid and corrosive gases

3. Segmented heat tracing in the pump chamber to prevent condensation and agglomeration of process by-products

4. High pumping speed of 50000L/min, excellent hydrogen pumping performance

5. The ultimate vacuum can reach 0.5Pa, and the vacuum output is stable

6. Intelligent frequency conversion control, automatic speed reduction during standby, reducing energy consumption

7. Water cooled cooling structure, suitable for long-term continuous heavy load operation

8. Multi channel nitrogen purging to reduce dust corrosion and component loss

9. Supports 50/60Hz dual frequency, adaptable to different power grids

10. RS485 communication interface, supporting remote monitoring by the upper computer

11. Comes with fault self check and can record alarm history information

12. Compact overall structure, saving Subfab installation space

13. Compliant with SEMI-S2 and CE industry safety standards

14. Direct extraction at atmospheric pressure, without the need for additional front-end pumps

15. Modular components, easy disassembly and maintenance, extend maintenance cycle

Technologies EV-M502NSF-BE dry vacuum pump, with strong anti-corrosion and high pumping speed, energy-saving and stable, suitable for high load corrosion processes such as semiconductor etching and deposition.

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